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Volumn 36, Issue 5 B, 1997, Pages
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Epitaxial growth of InN by plasma-assisted metallorganic chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
DECOMPOSITION;
EPITAXIAL GROWTH;
FILM GROWTH;
FREE RADICALS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MORPHOLOGY;
ORGANOMETALLICS;
PLASMA APPLICATIONS;
SAPPHIRE;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTOR GROWTH;
SURFACE ROUGHNESS;
CARRIER GAS EFFECT;
INDIUM NITRIDE;
SEMICONDUCTING FILMS;
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EID: 0031143943
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.l595 Document Type: Article |
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Times cited : (18)
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References (11)
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