Deposition of copper films on silicon from cupric sulfate and hydrofluoric acid

Journal of the Electrochemical Society

Volumn 144, Issue 5, 1997, Pages 1777-1780

  Lee, M K ^a   Wang, J J ^a   Wang, H D ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; ELECTROCHEMISTRY; ELECTRODEPOSITION; HYDROFLUORIC ACID;

COPPER PLATING;

EID: 0031143297     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837678     Document Type: Article

References (10)

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