Hydrogen sensing in vacuum systems with catalytic field plate MNOS capacitors

Applied Surface Science

Volumn 115, Issue 1, 1997, Pages 74-79

  Hughes, R C ^a   Bastasz, R ^b   Ellis, W P ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; HYDROGEN; PRESSURE EFFECTS; VALVES (MECHANICAL);

GAS PULSE VALVES; LIGHT SPUTTER CLEANING; ULTRA HIGH VACUUM;

CHEMICAL SENSORS;

EID: 0031143021     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00846-X     Document Type: Article

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