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Volumn 20, Issue 5, 1997, Pages
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New frontiers in spin-on dielectrics
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ETCHING;
IMPURITIES;
PLASMA SPRAYING;
SEMICONDUCTING GLASS;
SILICONES;
DAMASCENE PROCESSING;
SPIN ON GLASS;
DIELECTRIC FILMS;
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EID: 0031142520
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (0)
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