High-wavelength-resolution extreme-ultraviolet multilayer mirror

Applied Optics

Volumn 36, Issue 13, 1997, Pages 2830-2838

  Nagata, Shin’ichi ^a   Tsuneta, Saku ^b   Sakao, Taro ^b   Yoshida, Tsuyoshi ^a   Hara, Hirohisa ^b   Kano, Ryouhei ^a   Ishiyama, Wakana ^c   Murakami, Katsuhiko ^c   Ohtan, Masayuki ^c  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL ASTRONOMICAL OBSERVATORY OF JAPAN   (Japan)

^c NIKON CORPORATION   (Japan)

Author keywords

Astrophysical plasma; Extreme ultraviolet optics; Multilayer; Plasma diagnostics; Silicon carbide

Indexed keywords

ALUMINUM; ASTROPHYSICS; CALCULATIONS; COMPUTER SIMULATION; LIGHT REFLECTION; MULTILAYERS; OPTICAL VARIABLES MEASUREMENT; PLASMA DIAGNOSTICS; SILICON CARBIDE; ULTRAVIOLET RADIATION; X RAY DIFFRACTION;

EXTREME ULTRAVIOLET OPTICS; GRAZING INCIDENCE X RAY DIFFRACTION; MULTILAYER MIRRORS; WAVELENGTH RESOLUTION;

MIRRORS;

EID: 0031142442     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002830     Document Type: Article

References (13)

1. R. Mewe, E. H. B. M. Gronenschild, and G. H. J. van den Oord, “Calculated X-radiation form optically thin plasmas. V, ” As-tron. Astrophys. Suppl. Ser. 62, 197-254 (1985).
2. R. Mewe, J. R. Lemen, and G. H. J. van den Oord, “Calculated X-radiation form optically thin plasmas. VI. Improved calculations for continuum emission and approximation formulae for nonrelativistic average Gaunt factors, ” Astron. Astrophys. Suppl. Ser. 65, 511-536 (1986).
3. J. P. Delaboudinere, G. E. Gabriel, G. E. Artzner, F. Millier, D. J. Michels, K. P. Dere, R. A. Howard, R. W. Kerplin, R. C. Catura, R. A. Stern, J. R. Lemen, W. M. Neupert, J. B. Gur-man, P. Cugnon, A. Koeckelenbergh, E. L. Van Dessel, C. Jamar, A. Mausherat, J. P. Chauvineau, and J. P. Marioge, “The extreme ultraviolet imaging telescope on board SOHO, ” in X-Ray/EUV Optics for Astronomy and Microscopy, R. B. Hoover, ed., Proc. SPIE 1160, 518-524, (1989).
4. J. W. Brosius, J. M. Davila, and R. J. Thomas, “Measuring active and quiet-sun coronal plasma properties with extreme-ultraviolet spectra from SERTS, ” Astrophys. J. Sup. Ser. 106, 143-1164 (1996).
5. J. P. Delaboudinere and J. P. Chauvineau, “Metal oxide multilayer with narrow band pass, ” in X-Ray/EUV Optics for Astronomy and Microscopy, R. B. Hoover, ed., Proc. SPIE 1160, 260-263 (1989).
6. J. P. Delaboudiniere, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Deeper, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Morioge, R. C. Ca-tura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugono, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO Mission, ” Sol. Phys. 162, 291-312 (1995).
7. J. P. Delaboudiniere, J. F. Hochedez, J. P. Chauvineau, and L. Valiergue, “Tuning multilayered mirrors light traps for rejection of 30.4-nm radiation, ” in Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover and A. B. Walker, eds., Proc. SPIE 1742, 296-303 (1994).
8. B. W. Smith, J. J. Bloch, and D. Roussel-Dupre, “Metal multilayer mirrors for EUV wide field telescopes, ” in X-Ray/EUV Optics for Astronomy and Microscopy, R. B. Hoover, ed., Proc. SPIE 1160, 171-175 (1989).
9. E. Spiller, Soft X-ray Optics (SPIE Press, Bellingham, Wash., 1994).
10. K. Murakami, H. Nakamura, T. Ohisino, M. Ohtani, and H. Nagata, “Characterization of molybdenum/silicon multilayers deposited by ion beam sputtering and rf magnetron sputtering, ” in Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover and A. B. Walker, eds., Proc. SPIE 1742, 614-620 (1994).
11. S. Morita, J. Fujita, K. Fukui, K. Sakai, M. Watanabe, E. Ishiguro, and K. Yamashita, “Fusion and plasma diagnostic center-synchrotron radiation experiment (I), ” Report IPPJ-OT-135 (in Japanese) (Institute of Plasma Physics, Nagoya University, 1987).
12. H. S. Ogawa, D. R. McMullin, and D. L. Judge, “Normal incidence spectrophotometer with high-density transmission grating technology and high-efficiency silicon photodiodes for absolute solar extreme-ultraviolet irradiance measurement, ” Opt. Eng. 32, 3121-3125 (1993).
13. B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30, 000 eV, Z = 1-92, ” At. Data Nucl. Data Tables 54 (2), 181-342 (1993).