Excimer laser deposition of c-axis oriented Pb(Zr, Ti)O3 thin films on silicon substrates with direct-current glow discharge

Journal of Materials Research

Volumn 12, Issue 5, 1997, Pages 1179-1182

  Zheng, Lirong ^a   Hu, Xuhong ^a   Yang, Pingxiong ^a   Xu, W Ping ^a   Lin, Chenglu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; DEPOSITION; ELECTRIC GROUNDING; EXCIMER LASERS; FERROELECTRIC MATERIALS; GLOW DISCHARGES; HYSTERESIS; LASER APPLICATIONS; PLATINUM; SILICON; SURFACE STRUCTURE; THIN FILMS;

LASER DEPOSITION; LEAD ZIRCONIUM TITANATES;

LEAD COMPOUNDS;

EID: 0031142220     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0164     Document Type: Article

References (10)

1. S. L. Swartz and V. E. Wood, Condensed Matter News 1, 4 (1992).
2. D. Roy, S. B. Krupanidhi, and J. P. Dougherty, J. Appl. Phys. 69, 7932 (1991).
3. H. Kidoh, T. Ogawa, A. Morimoto, and T. Shimizu, Appl. Phys. Lett. 58, 2910 (1991).
4. R. E. Leuchtner, K. S. Grabowski, D. B. Chrisey, and J. S. Horowitz, Appl. Phys. Lett. 60, 1193 (1992).
5. Witanachchi, M. S. Kwok, X. W. Wang, and D. T. Shaw, Appl. Phys. Lett. 53, 234 (1988).
6. R. K. Singh, J. Narayan, A. K. Singh, and J. Krishnaswamy, Appl. Phys. Lett. 54, 2271 (1989).
7. D. Roy, S. B. Krupanidhi, and J. P. Dougherty, J. Vac. Sci. Technol. A10, 1827 (1992).
8. S. M. Rossnagel and J. J. Cuomo, MRS. Bull. 16, 40 (1987).
9. M. Adachi, T. Matsuzaki, T. Yamada, T. Shiosaki, and A. Kawabata, Jpn. J. Appl. Phys. 26, 550 (1987).
10. B. Jaffe, Piezoelectric Ceramics (Academic Press, London, 1971), p. 136.