Beam drift in submicron focused ion beam system

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 17, Issue 3, 1997, Pages 167-174

  Yu, Xuedong ^a   Bi, Jianhua ^a   Liu, Xinhong ^a   Song, Fenghua ^a   Lu, Jiahe ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FOCUSING; MAGNETIC LENSES;

BEAM DRIFT; MICROFABRICATION; SUBMICRON FOCUSED ION BEAM;

ION BEAMS;

EID: 0031141769     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)