Study of the microscopic surface structure of a quartz substrate for surface acoustic wave devices

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 5 SUPPL. B, 1997, Pages 3081-3086

  Noge, Satoru ^a   Araki, Nobushige ^b   Komine, Kenji ^b   Suzuki, Hiroji ^b   Shiraishi, Hideya ^b   Hohkawa, Kohji ^a  

^a KANAGAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b MEIDENSHA CORPORATION   (Japan)

Author keywords

Atomic force microscopy; Crystallography; Damage layer; Quartz substrate; Surface acoustic wave

Indexed keywords

Y CUT QUARTZ SURFACE;

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; QUARTZ; X RAY CRYSTALLOGRAPHY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0031141621     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3081     Document Type: Article

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