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Precision Engineering
Volumn 20, Issue 3, 1997, Pages 161-170
Submicrometer overshoot control of rapid and precise positioning
Author keywords

Friction; Microdynamics; Rapid and precise positioning; Submicrometer overshoot; Variable structure control
Indexed keywords

ALGORITHMS; CONTROL EQUIPMENT; FRICTION; MATHEMATICAL MODELS; PRECISION ENGINEERING;
EID: 0031140920     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)00010-x     Document Type: Article
Times cited : (34)
References (9)
  • 1
    • 0028460355 scopus 로고
    • A survey of models, analysis tools, and compensation methods for the control of machines with friction
    • Armstrong-Hélouvry, B., Dupont, P. and De Wit, C. C. "A survey of models, analysis tools, and compensation methods for the control of machines with friction," Automatica, 1994, 30, 1083-1138
    • (1994) Automatica , vol.30 , pp. 1083-1138
    • Armstrong-Hélouvry, B.1    Dupont, P.2    De Wit, C.C.3
  • 2
    • 0001801668 scopus 로고    scopus 로고
    • Nanometer positioning and its micro-dynamics
    • Futami, S., Furutani, A. and Yoshida, S. "Nanometer positioning and its micro-dynamics," Nanotechnology, 1, 31-37
    • Nanotechnology , vol.1 , pp. 31-37
    • Futami, S.1    Furutani, A.2    Yoshida, S.3
  • 3
    • 0027560434 scopus 로고
    • Model reference adaptive control of dual-mode micro/macro dynamics of ball screws for nanometer motion
    • Ro, P. I. and Hubbel, P. I. "Model reference adaptive control of dual-mode micro/macro dynamics of ball screws for nanometer motion," J Dyn Syst, Meas, Control, 1993, 15, 103-108
    • (1993) J Dyn Syst, Meas, Control , vol.15 , pp. 103-108
    • Ro, P.I.1    Hubbel, P.I.2
  • 4
    • 0026222981 scopus 로고
    • Robust, near time-optimal control of nonlinear second-order system: Theory and experiments
    • Newman, W. S. and Souccar, K. "Robust, near time-optimal control of nonlinear second-order system: Theory and experiments," J Dyn Sys, Meas, Control, 1991, 113, 363-370
    • (1991) J Dyn Sys, Meas, Control , vol.113 , pp. 363-370
    • Newman, W.S.1    Souccar, K.2
  • 6
    • 0028436876 scopus 로고
    • Avoiding stick-slip through PD control
    • Dupont, P. E. "Avoiding stick-slip through PD control," IEEE Trans Auto Control, 1994, 39, 1094-1097
    • (1994) IEEE Trans Auto Control , vol.39 , pp. 1094-1097
    • Dupont, P.E.1
  • 7
    • 0027685166 scopus 로고
    • Stick slip and control in low-speed motion
    • Armstrong-Hélouvry, B. "Stick slip and control in low-speed motion," IEEE Trans Auto Control, 1993, 38, 1483-1496
    • (1993) IEEE Trans Auto Control , vol.38 , pp. 1483-1496
    • Armstrong-Hélouvry, B.1
  • 8
    • 0026821789 scopus 로고
    • Analysis of algorithms for velocity estimation from discrete position versus time data
    • Brown, R. H., Schneider, S. C. and Mulligan, M. G. "Analysis of algorithms for velocity estimation from discrete position versus time data," IEEE Trans Ind Elec, 1992, 39, 11-19
    • (1992) IEEE Trans Ind Elec , vol.39 , pp. 11-19
    • Brown, R.H.1    Schneider, S.C.2    Mulligan, M.G.3

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.