Deposition of the chemically sensitive polymer layer on SGFET gate by laser-induced chemical-vapour polymerization

Sensors and Actuators, B: Chemical

Volumn 40, Issue 2-3, 1997, Pages 143-145

  Papež, Vítězslav ^a,b,c   Brodská, Šárka ^a,d  

^a J HEYROVSKÝ INSTITUTE OF PHYSICAL CHEMISTRY   (Czech Republic)

^b CHARLES UNIVERSITY   (Czech Republic)

^c BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^d INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

Author keywords

Laser induced chemical vapour polymerization (LID); Suspended gate field effect transistors

Indexed keywords

CHEMICAL MODIFICATION; CHEMICAL VAPOR DEPOSITION; FIELD EFFECT TRANSISTORS; ORGANIC POLYMERS; POLYMERIZATION;

LASER INDUCED CHEMICAL VAPOUR POLYMERIZATION (LID); SUSPENDED GATE FIELD EFFECT TRANSISTORS (SGFET);

CHEMICAL SENSORS;

EID: 0031140605     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-4005(97)80253-5     Document Type: Article

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