Toward Classification of Particle Properties Using Light Scattering Techniques

Journal of the IEST

Volumn 40, Issue 3, 1997, Pages 15-21

  Warner, Thomas L ^a   Hirleman, E Dan ^b  

^a INTEL CORPORATION   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Laser diagnostics; Light scattering; Particle characterization; Particle scatter

Indexed keywords

ALGORITHMS; CONTAMINATION; IMPURITIES; LASER DIAGNOSTICS; LIGHT SCATTERING; PARTICLE SIZE ANALYSIS;

CONTAMINATION FREE MANUFACTURING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031140564     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. Warner, T.L., "Characterization Of Light Scatter by Particles of Various Refractive Indices on Semiconductor Surfaces," M.S. Thesis, Arizona State University (1994).
2. Bawolek, E.J., "Light Scattering by Spherical Particles on Semiconductor Surfaces," Ph.D. Dissertation. Arizona State University (1992).
3. Weber, D.C., "Light Scattered by Micron and Submicron Spheres on Optically Smooth Surfaces," M.S. Thesis, Arizona State University (1986).
4. Nahm, K.B., and Wolfe, W.L., "Light Scattering by Polystyrene Spheres n a Mirror," Proceedings of the SPIE - The International Society for Optical Engineeering, V. 675, p. 295 (1986).
5. Nahm, K.B., and Wolfe, W.L., "Light-Scattering Models for Spheres on a Conducting Plane: Comparison with Experiment," Applied Optics, V. 26, p. 2995 (1987).
6. Hodkinson, J.R., and Greenleaves, I., "Computation of Light Scattering and Extinction by Spheres According to Diffraction and Geometrical Optic, and some Comparisons with the Mie Theory," Journal of the Optical Society of America, V. 53, p. 577 (1963).
7. Bohren, C.F., and Huffman, D.R., Absorption and Scattering of Light by Small Particles, Wiley-Interscience, New York (1983).