Synthesis of stoichiometric titania films by oxygen ion assistance of growing titanium

Surface and Coatings Technology

Volumn 91, Issue 3, 1997, Pages 153-157

  Rizzo, A ^a   Mirenghi, L ^a   Quirini, A ^a   Scaglione, S ^b  

^a Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

^b ENEA   (Italy)

Author keywords

Dual ion beam depostion; Optical coatings; Titanium oxide

Indexed keywords

ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; SPUTTER DEPOSITION; TITANIUM; TITANIUM DIOXIDE; X RAY SPECTROSCOPY;

ION BEAM DEPOSITION; STOICHIOMETRIC FILMS;

OPTICAL COATINGS;

EID: 0031140432     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00005-4     Document Type: Article

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