Electrical properties of evaporated polycrystalline Ge thin-films

Thin Solid Films

Volumn 300, Issue 1-2, 1997, Pages 138-143

  Kobayashi, Hiroaki ^a   Inoue, Narumi ^a   Uchida, Takashi ^a   Yasuoka, Yoshizumi ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

Evaporation; Germanium; Heat treatment

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; EVAPORATION; HALL EFFECT; HEAT TREATMENT; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS;

POLYCRYSTALLINE GERMANIUM THIN FILMS;

THIN FILMS;

EID: 0031139781     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09447-3     Document Type: Article

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