Integrated Fabry-Pérot distance control for atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 579-585

  Ruf, A ^a   Abraham, M ^a   Diebel, J ^a   Ehrfeld, W ^a   Guthner P ^b   Lacher, M ^a   Mayr, K ^a   Reinhardt, J ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b Omicron Vakuumphysik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISTANCE MEASUREMENT; FABRICATION; FABRY-PEROT INTERFEROMETERS; FIBER OPTICS; MECHANICAL VARIABLES CONTROL; METALLIC FILMS; OPTIMIZATION; THIN FILMS;

CANTILEVER EXCHANGE; INTEGRATED FABRY-PEROT DISTANCE CONTROL; INTEGRATED OPTICAL DETECTION SYSTEM; THIN FILM TECHNOLOGY;

ATOMIC FORCE MICROSCOPY;

EID: 0031139772     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589295     Document Type: Article

References (20)

1. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 59, 930 (1986).
2. T. R. Albrecht, S. Akamine, T. E. Carver, and C. Quate, J. Vac. Sci. Technol. A 8, 3386 (1990).
3. O. Wolter, T. Bayer, and J. Greschner, J. Vac. Sci. Technol. B 9, 1353 (1991).
4. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988).
5. P. Avouris, Atomic and Nanometer-Scale Modification of Materials: Fundamentals and Applications, NATO Series E: Applied Sciences Vol. 239 (Kluwer Academic, Dordrecht, The Netherlands, 1993).
6. M. Tortonese, R. C. Barett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993).
7. J. Tansock and C. C. Williams, Ultramicroscopy 42-44, 1464 (1992).
8. G. Neubauer, S. R. Cohen, G. M. McClelland, D. Horne, and C. M. Mate, Rev. Sci. Instrum. 61, 2296 (1990).
9. J. Brugger, N. Blanc, P. Renaud, and N. F. de Rooij, Sens. Actuators A 43, 339 (1994).
10. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1991).
11. D. Rugar, H. J. Mamin, and P. Güthner, Appl. Phys. Lett. 55, 2588 (1989).
12. M. Binggeli, G. Kotrotsios, R. Christoph, H. E. Hintermann, T. Berghaus, and P. Güthner, Rev. Sci. Instrum. 64, 2888 (1993).
13. OMICRON Vakuumphysik GmbH, Idsteiner Strasse 78, 65232 Taunusstein, Germany.
14. E. Hecht, Optics, 2nd ed. (Addison-Wesley, Reading, MA, 1987).
15. M. Francon, Optical Interferometry (Academic, New York, 1966).
16. E. D. Palik, Handbook of Optical Constants of Solids (Academic, London, 1985).
17. S. Morley, Ph.D. thesis, TH Aachen, Aachen, Germany, 1993.
18. Corning 7740 borosilicate glass supplied by Corning GmbH, 65189 Wiesbaden, Germany.
19. J. Lux and J. Kaiser, in Materials for Microstructures, edited by UETP-MEMS, Training in microsystems (FSRM, Switzerland), Vol. 1.
20. The nickel grating was produced by the microplating group of the Institute of Microtechnology Mainz GmbH.