High-resolution displacement measurement using mode interference in the optical waveguide

IEEE Photonics Technology Letters

Volumn 9, Issue 5, 1997, Pages 651-653

  Doi, Masaaki ^a   Iwasaki, Yutaka ^a   Shionoya, Takashi ^a   Okamoto, Kazuya ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Displacement measurement; Integrated optics; LiNbO3; Mode interfernece; Optical measurement; Optical sensor; Wavefront detection

Indexed keywords

FOCUSING; INTEGRATED OPTICS; LIGHT INTERFERENCE; LIGHT MEASUREMENT; LIGHT REFLECTION; OPTICAL INSTRUMENTS; OPTICAL RESOLVING POWER; OPTICAL SENSORS; PHOTODETECTORS; SEMICONDUCTOR LASERS; WAVEFRONTS;

MODE INTERFERENCE; OPTICAL DISPLACEMENT MEASURING SYSTEMS;

OPTICAL WAVEGUIDES;

EID: 0031139671     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.588181     Document Type: Article

References (3)

1. H. Ooki, R. Arimoto, T. Shionoya, K. Matsuura, and J. Iwasaki, "Laser scanning mode interference contrast microscope and its application to step height measurement," Jpn. J. Appl. Phys., vol. 32, pp. 4998-5001, 1993.
2. K. Okamoto, M. Doi, T. Irita, Y. Nakano, and K. Tada, "Fabrication of TE/TM mode splitter using completely buried GaAs/GaAlAs waveguide," Jpn. J. Appl. Phys., vol. 34, pp. 151-155, 1995.
3. R. Juskaitis and T. Wilson, "Surface profiling with scanning optical microscopes using two-mode optical fibers," Appl. Opt., vol. 31, pp. 4569-4574, 1992.