A temperature all-silicon micro-sensor based on the thermo-optic effect

IEEE Transactions on Electron Devices

Volumn 44, Issue 5, 1997, Pages 766-774

  Cocorullo, Giuseppe ^a   Della Corte, Francesco G ^b   Iodice, Mario ^c   Rendina, Ivo ^d   Sarro, Pasqualina M ^d  

^a CNR   (Italy)

^b UNIVERSITY OF CALABRIA   (Italy)

^c UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^d DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT ERRORS; OPTOELECTRONIC DEVICES; PERFORMANCE; SENSORS; SILICON WAFERS;

SILICON TEMPERATURE SENSORS;

TEMPERATURE MEASURING INSTRUMENTS;

EID: 0031139262     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.568038     Document Type: Article

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