Progress in optoelectronic-VLSI smart pixel technology based on GaAs/AlGaAs MQW modulators

International Journal of Optoelectronics

Volumn 11, Issue 3, 1997, Pages 181-198

  Krishnamoorthy, Ashok V ^a   Goossen, Keith W ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; HYBRID INTEGRATED CIRCUITS; LIGHT MODULATORS; OPTICAL INTERCONNECTS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR QUANTUM WELLS; VLSI CIRCUITS;

SMART PIXEL ARRAYS (SPA);

INTEGRATED OPTOELECTRONICS;

EID: 0031130272     PISSN: 09525432     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (43)

1. HINTON, H. S., 1988, Architectural considerations for photonic switching networks. IEEE J. Select. Areas. Comm., 6, 1209-26.
2. LEE, S. H., ESENER, S. C., TITLE, M. A., and DRABIK, T. J., 1986, Two-dimensional silicon/PLZT spatial light modulators: design considerations and technology, Opt. Eng., 25, 250-260.
3. KIAMILEV, F., ESENER, S. C., PATURI, R., FAINMAN, Y., MERCIER, P., GUEST, C. C., and LEE, S. H., 1989, Programmable optoelectronic multiprocessors and their comparison with symbolic substitution for digital optical computing. Opt. Eng., 28, 396-408.
4. See for example, 1996, Proc. IEEE LEOS Summer Top. Meet. on Smart Pixels, (Keystone), August.
5. DOW, J. D., and REDFIELD, D., 1970, Electroabsorption in semiconductors: the exitonic absorption edge. Phys. Rev. B, 1, 3358-3371.
6. MILLER, D. A. B., CHEMLA, D., and SCHMITT-RINK, S., 1988, In Optical Nonlinearities and Instabilities in Semiconductors, edited by H. Haug, (San Diego: Academic Press), p. 325.
7. BOYD, G. D., MILLER, D. A. B., CHEMLA, D. S., MCCALL, S. L., GOSSARD, A. C., and ENGLISH, J. H., 1987, Multiple quantum well reflection modulator. Appl. Phys. Lett., 50, 1119-1121.
8. WHITEHEAD, M., RIVERS, A., PERRY, G., ROBERTS, J. S., and BUTTON, C., 1989, Low-voltage multiple quantum well reflection modulator with on:off ratio greater than 100:1. Electron. Lett., 25, 984-985.
9. YAN, R. H., SIMES, R. J., and CAULDRON, L. A., 1989, Electroabsorptive Fabry-Perot reflection modulators with asymmetric mirrors. IEEE Photon. Tech. Lett., 1, 273-275.
10. MILLER, D. A. B., 1990, Quantum-well self-electrooptic effect devices, Optical and Quantum Electron., 22, 561-598.
11. LENTINE, A., MCCORMICK, F., NOVOTNY, R., CHIROVSKY, L. M. F., D'ASARO, L. A., KOPF, R., KUO, J. M., and BOYD, G. D., 1990, A 2 Kbit array of symmetric self-electrooptic effect devices, IEEE Photon. Tech. Lett., 2, 51-53.
12. MILLER, D. A. B., FEUER, M. D., CHANG, T. Y., SHUNK, S. C., HENRY, J. E., BURROWS, D. J., and CHEMLA, D. S., 1989, Field-effect transistor self-electrooptic effect device: integrated photodiode, quantum well modulator, and transistor. IEEE Photon. Tech. Lett., 1, 62-64.
13. D'ASARO, L. A., CHIROVSKY, L. M. F., LASKOWSKI, E. J., PEI, S. S., WOODWARD, T. K., LENTINE, A. L., LEIBENGUTH, R. E., FOCHT, M. W., FREUND, J. M., GUTH, G. D., and SMITH, L. E., 1993, Batch fabrication and operation of GaAs-AlGaAs field-effect transistor self-electrooptic effect device (FET-SEED) smart pixel arrays, IEEE J. Quant. Electron., 29, 670-675.
14. MCCORMICK, F. B., LENTINE, A. L., MORRISON, R. L., SASIAN, J. M., CLOONAN, T. J., NOVOTNY, R. A., BECKMAN, M. G., WOJCIK, M. J., HINTERLONG, S. J., and BUCHHOLZ, D. B., 1994, 155 Mb/s operation of a FET-SEED free-space switching network. IEEE Photon. Tech. Lett., 6, 1479-1481.
15. GOOSSEN, K. W., WALKER, J. A., CUNNINGHAM, J. E., JAN, W. Y., MILLER, D. A. B., TEWKSBURY, S. K., and HORNAK, L. A., 1993, Monolithic integration of GaAs/ AlGaAs multiple quantum well modulators and silicon metal-oxide semiconductor transistor. Proc. OSA Top. Meet. Photonics in Switching, 16, 94-98.
16. Research Devices Piscataway, New Jersey, U.S.A.
17. GOOSSEN, K. W., SANTOS, M. B., CUNNINGHAM, J. E., and JAN, W. Y., 1993, Independence of absorption coefficient-linewidth product to material system for multiple quantum wells with exilons from 850 nm to 1064 nm. IEEE Photon. Tech. Lett., 5, 1392-1394.
18. GOOSSEN, K. W., CUNNINGHAM, J. E., and JAN, W. Y., 1993, GaAs 850 nm modulators solder-bonded to silicon. IEEE Photon. Tech. Lett., 5, 776-778.
19. GOOSSEN, K. W., WALKER, J. A., D'ASARO, L. A., HUI, S. P., TSENG, B., LEIBENGUTH, R., KOSSIVES, D., BACON, D. D., DAHRINGER, D., CHIROVSKY, L. M. F., LENTINE, A. L., and MILLER, D. A. B., 1995, GaAs MQW modulators integrated with silicon CMOS, IEEE Photon. Technol. Lett., 7, 360-362.
20. KRISHNAMOORTHY, A. V., LENTINE, A. L., GOOSSEN, K. W., WALKER, J. A., WOODWARD, T. K., FORD, J. E., APLIN, G. F., D'ASARO, L. A. D., HUI, S. P., TSENG, B., LEIBENGUTH, R., KOSSIVES, D., DAHRINGER, D., CHIROVSKY, L. M., and MILLER, D. A. B., 1995, 3-D integration of MQW modulators over active sub-micron CMOS circuits: 375 Mb/s transimpedance receiver-transmitter circuit, IEEE Photon. Technol. Lett., 7, 1288-1290.
21. KRISHNAMOORTHY, A. V., FORD, J. E., GOOSSEN, K. W., WALKER, J. A., LENTINE, A. L., D'ASARO, L. A., HUI, S. P., TSENG, B., LEIBENGUTH, R., KOSSIVES, D., DAHRINGER, D., CHIROVSKY, L. M. F., KIAMILEV, F. E., APLIN, G. F., ROZIER, R. G., and MILLER, D. A. B., 1996, Photonic Page Buffer based on GaAs MQW modulators bonded directly over active silicon CMOS circuits, Appl. Opt., 35, 2439-2448.
22. CHIROVSKY, L. M. F., FOCHT, M. W., FREUND, J. M., GUTH, G. D., LEIBENGUTH, R. E., PRZYBYLEK, G. J., SMITH, L. E., ASARO, L. A. D., LENTINE, A. L., NOVOTNY, R. A., and HUCHHOLZ, D. B., 1991, Large arrays of symmetric self-electro-optic effect devices. Technical Digest OSA Topical Meeting on Optical Computing, Salt Lake City, March, pp. 150-153.
23. BOYD, G. D., CHIROVSKY, L. M. F., and MORGAN, R. A., 1990, 33ps optical switching of symmetric self-electrooptic effect devices. Appl. Phys. Lett., 57, 1843-1845
24. BOYD, G. D., CAVAILLES, J. A., CHIROVSKY, L. M. F., and MILLER, D. A. B., 1993, Wavelength dependence of saturation and thermal effects in multiple-quantum well modulators, Appl. Phys. Lett., 63, 1715-1717.
25. HINTON, H. S., CLOONAN, T. J., MCCORMICK, F. B., LENTIN, A. L., and TOOLEY, F. A. P., 1994, Free-space digital optical systems. Proc. the Institute of Electronic and Electrical Engineers, 82, 1632-49, November.
26. LENTINE, A. L., and MILLER, D. A. B., 1997, Evolution of the SEED technology: bistable logic gates to optoelectronic smart pixels. IEEE J. Quant. Electron., 29, 655-669.
27. 1-x FET-SEED: a basic optically addressed integrated circuit. IEEE Photon. Tech. Lett., 7, 763-765.
28. BOYD, G. D., LIVESCU, G., CHIROVSKY, L. M. F., and LENTINE, A. L., 1994, Mode-locked pulse operation of GaAs/AlGaAs field effect transistor self-electro-effect device smart pixels and saturation considerations. Appl. Phys. Lett., 65, 3108-3110.
29. WOODWARD, T. K., LENTINE, A. L., and CHIROVSKY, L. M. F., 1994, Experimental sensitivity studies of diode-clamped FET-SEED smart-pixel optical receivers, IEEE J. Quant. Electron., 30, 2319-2324.
30. WOODWARD, T. K., LENTINE, A. L., and CHIROVSKY, L. M. F., 1995, 1Gbit/s operation and bit-error rate studies of FET-SEED diode-clamped smart-pixel optical receiver. IEEE Photon. Tech. Lett., 7, 763-765.
31. KRISHNAMOORTHY, A. V., WOODWARD, T. K., NOVOTNY, R. A., GOOSSEN, K. W., WALKER, J. A., LENTINE, A. L., D'ASARO, L. A., HUI, S. P., TSENG, B., LEIBENGUTH, R., KOSSIVES, D., DAHRINGER, D., CHIROVSKY, L. M. F., APLIN, G. F., ROZIER, R. G., KIAMILEV, F. E., and MILLER, D. A. B., 1995, Ring oscillators with optical and electrical readout based on hybrid GaAs MQW modulators bonded to 0.8 micron CMOS. Electron. Lett., 31, 1917-1918.
32. KRISHNAMOORTHY, A. V., and MILLER, D. A. B., 1996, Scaling optoelectronic-VLSI circuits into the 21st century: a technology roadmap. IEEE J. Select. Topics in Quantum Electron., 2(1), 55-76.
33. KRISHNAMOORTHY, A. V., WOODWARD, T. K., GOOSSEN, K. W., WALKER, J. A., LENTINE, A. L., CHIROVSKY, L. M. F., HUI, S. P., TSENG, B., LEIBENGUTH, R. I., CUNNINGHAM, J. E., and JAN, W. Y., 1996, Operation of a single-ended 550 Mbit/s, 41 fJ, Hybrid CMOS/MQW receiver. Electron. Lett., 32, 764-765.
34. WOODWARD, T. K., KRISHNAMOORTHY, A. V., LENTINE, A. L., GOOSSEN, K. W., WALKER, J. A., CUNNINGHAM, J. E., JAN, W. Y., D'ASARO, L. A., CHIROVSKY, L. M. F., HUI, S. P., TSENG, B., KOSSIVES, D., DAHRINGER, D., and LEIBENGUTH, R., 1995, 1 Gb/s two-beam transimpedance smart-pixel optical receivers made from hybrid GaAs MQW modulators bonded to 0.8 μm silicon CMOS. IEEE Photon. Tech. Lett., 7, 763-765.
35. WOODWARD, T. K., KRISHNAMOORTHY, A. V., LENTINE, A. L., and CHIROVSKY, L. M. F., 1996, Optical receivers for optoelectronic VLSI. IEEE J. of Sel. Topics in Quantum Electron., 2(1), 106-116.
36. WOODWARD, T. K., KRISHNAMOORTHY, A. V., GOOSSEN, K. W., WALKER, J. A., TSENG, B., LOTHIAN, J., HUI, S., and LEIBENGUTH, R., 1997, Modulator-driver circuits for optoelectronic VLSI. IEEE Photonics Tech. Lett., 9(6), 839-841.
37. GOOSSEN, K. W., TSENG, B., HUI, S. P., WALKER, J. A., LEIBENGUTH, R., CHIROVSKY, L. M. F., and KRISHNAMOORTHY, A. V., 1996, Multiple attachment GaAs-on-Si hybrid optoelectronic/VLSI chips. Proc. LEOS Topical Meet. on Smart Pixels, Paper WB-3, pp. 24-25.
38. GOOSSEN, K. W., CUNNINGHAM, J. E., JAN, W. Y., and MILLER, D. A. B., 1993, Interleaved contact electroabsorption modulator using doping-selective electrodes with 25°C to 95°C operating range, IEEE Photon. Tech. Lett., 5, 181-183.
39. GOOSSEN, K. W., CUNNINGHAM, J. E., and JAN, W. Y., 1994, Stacked diode electroabsorption modulator. IEEE Photonics Tech. Lett., 6, 936-938.
40. WORCHESKY, T. L., RITTER, K. J., MARTIN, R., and LANE, B., 1996, Large arrays of spatial light modulators hybridized to silicon integrated circuits. Appl. Opt., 35, 1180-1186.
41. 1993-94 The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, p. B2.
42. GOODMAN, J. W., LEONBERGER, F. J., KUNG, S.-Y., and ATHALE, R. A., 1984, Optical interconnections for VLSI systems. Proc. Institute of Electronic and Electrical Engineers, 72, 850-866.
43. LENTINE, A. L., GOOSSEN, K. W., WALKER, J. A., CHIROVSKY, L. M. F., D'ASARO, L. A., HUI, S. P., TSENG, B. T., LEIBENGUTH, R. E., KOSSIVES, D. P., DAHRINGER, D. W., BACON, D. D., WOODWARD, T. K., and MILLER, D. A. B., 1996, Arrays of optoelectronic switching nodes comprised of flip-chip bonded MQW modulators and detectors on silicon CMOS circuitry, IEEE Photon. Technol. Lett., 8, 221-223.