c-Boron-aluminum nitride alloys prepared by ion-beam assisted deposition

Thin Solid Films

Volumn 298, Issue 1-2, 1997, Pages 33-38

  Edgar, J H ^a   Smith, D T ^b   Eddy Jr , C R ^c   Carosella, C A ^c   Sartwell, B D ^c  

^a 129 Seaton Hall   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Aluminium nitride; Boron nitride; Ion beam assisted deposition

Indexed keywords

ALUMINUM COMPOUNDS; AUGER ELECTRON SPECTROSCOPY; BORON COMPOUNDS; CRYSTAL LATTICES; DEPOSITION; ETCHING; HARDNESS; ION BEAMS; LATTICE CONSTANTS; NITRIDES; PHOSPHORIC ACID; THIN FILMS;

ALUMINUM NITRIDES; BORON NITRIDES; ION BEAM ASSISTED DEPOSITION (IBAD);

BINARY ALLOYS;

EID: 0031125676     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08884-0     Document Type: Article

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