Automatic classification of wafer defects: Status and industry needs

IEEE transactions on components, packaging and manufacturing technology. Part C. Manufacturing

Volumn 20, Issue 2, 1997, Pages 164-167

  Shapiro, Arye ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; CRYSTAL DEFECTS; DATA ACQUISITION; LOGIC DEVICES; OPTICAL MICROSCOPY; POLYCRYSTALLINE MATERIALS;

AUTOMATIC DEFECT CLASSIFICATION (ADC); BETA SITE TESTING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031124762     PISSN: 10834400     EISSN: None     Source Type: Journal    
DOI: 10.1109/3476.622886     Document Type: Article

References (11)

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