The influence of young's modulus on roundness in silicon sphere fabrication

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 572-575

  Collins, John G ^a   Giardini, Walter J ^a   Leistner, Achim J ^a   Kenny, Michael J ^a  

^a CSIRO   (Australia)

Author keywords

Avogadro constant; Polishing; Roundness; Silicon crystal; Spheres; Young's modulus

Indexed keywords

AVOGADRO'S CONSTANT;

CHEMICAL POLISHING; CRYSTAL ORIENTATION; CRYSTAL SYMMETRY; ELASTIC MODULI; SINGLE CRYSTALS; SPHERES;

SILICON;

EID: 0031123654     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.571918     Document Type: Article

References (7)

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