Evidence of anisotropic structures of free-standing porous silicon films

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 79-83

  Bruska, A ^a   Astrova, E V ^c   Falke, U ^a   Raschke, T ^b   Radehaus, Ch ^b   Mietschold, M ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Inst Microsystems Semiconduct T   (Germany)

^c IOFFE INSTITUTE   (Russian Federation)

Author keywords

Microstructure; Porous silicon

Indexed keywords

ANISOTROPY; ELECTROCHEMISTRY; ETCHING; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; POROUS SILICON;

ANISOTROPIC STRUCTURES; ELECTROCHEMICAL ETCHING; FREE STANDING POROUS SILICON FILMS; MECHANICAL STRESS RELATED EFFECT; VERTICAL INHOMOGENEITIES;

THIN FILMS;

EID: 0031123501     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09417-5     Document Type: Article

References (19)

1. L.T. Canham, Appl. Phys. Lett., 57 (1990) 1046.
2. P. Basmaji, G. Surdutovich, R. Vitlina, J. Kolenda and V.S. Bagnato, Solid State Commun., 91 (1994) 649.
3. M.J. Sailor and K.L. Kavangh, Adv. Mater., 4 (1992) 432.
4. T. George, M.S. Anderson, W.T. Pike, T.L. Lin and R.W. Fathauer, Appl. Phys. Lett., 60 (1992) 2359.
5. V. Lehman, B. Jobst, Th. Muschnik, A. Kux and V. Petrova-Koch, Jap. J. Appl. Phys., 32 (1993) 2095.
6. E. Takasuka and K. Kamei, Appl. Phys. Lett., 65 (1994) 484.
7. V. Lehman, Thin Solid Films, 255 (1995) 1.
8. V. Lehman, J. Electrochem. Soc., 140 (1993) 2837.
9. Y.H. Xie, M.S. Hibertsen, W.L. Wilson, S.A. Ipri, G.E. Carver, W.L. Brown, E.M. Dons, B.E. Weir, A.R. Kortan, G.P. Watson and A.J. Liddle, Phys. Rev. B, 49 (1994) 5386.
10. J. von Berhnen, L. Tsybeskov and P.M. Fauchet, Mater. Res. Soc. Symp. Proc., 358 (1995) 333.
11. G. Mauckner, W. Rebitzer, K. Thonke and R. Sauer, Solid State Commun., 91 (1994) 717.
12. A.G. Cullis and L.T. Canham, Nature, 353 (1991) 335.
13. H.E. Bridgers, J.H. Scaff, J.N. Shive and F.J. Biondi (eds), Transistor Technology, van Norstard, New York, 1958.
14. G.K. Moroz and A.V. Zherzdev, Semiconductors, 28 (1994) 550.
15. S. Frohnhoff and M.G. Berger, Adv. Mater., 6 (1994) 963.
16. M.G. Berger, R. Abens-Fisher, S.T. Frohnhoff, C. Dieker, K. Winz, H. Munder, H. Luth, M. Arntzen and W. Theiss, Mater. Res. Symp. Proc., 358 (1995) 327.
17. H. Kaneko, P.J. French and R.F. Wolffenbuttel, J. Luminesc., 57 (1993) 101.
18. R.L. Smith and S.D. Collins, J. Appl. Phys., 71 (1992) R1.
19. S.-L. Zhang, K.S. Ho, Y. Hou, B. Qian, P. Diao and S. Cai, Appl. Phys. Lett., 62 (1993) 642.