MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

Journal of Alloys and Compounds

Volumn 251, Issue 1-2, 1997, Pages 243-248

  Marks, T J ^a   Belot, J A ^a   Reedy, C J ^a   McNeely, R J ^a   Studebaker, D B ^a   Neumayer, D A ^a   Stern, C L ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

MOCVD; TGA

Indexed keywords

BARIUM COMPOUNDS; MOLECULAR STRUCTURE; POLYETHERS; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; VAPOR PRESSURE;

BARIUM HEXAFLUOROACETYLACETONATE; VOLATILITY;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0031123241     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-8388(96)02680-1     Document Type: Article

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