Investigations on ion beams from a high-current ion source

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 588-591

  Ratschko, Dirk ^a,b   Zhou, Baoguo G ^a,c   Knolle, Dieter ^a   Gläser, Michael ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b UNIVERSITY OF OSNABRÜCK   (Germany)

^c NATIONAL INSTITUTE OF METROLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; ELECTRIC DISCHARGES; ION BEAMS; ION SOURCES; MAGNETS; SPUTTERING;

BEAM CURRENT; DIPOLE MAGNETS; FARADAY CUP;

ARGON;

EID: 0031122495     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.571925     Document Type: Article

References (8)

1. M. Gläser, "Proposal for a novel method of precisely determining the atomic mass unit by the accumulation of ions," Rev. Sci. Instrum., vol. 62, pp. 2493-2494, 1991.
2. R. Keller, B. R. Nielson and B. Torp, "Metal beam production using a high current ion source," Nucl. Instrum. Methods, vol. B 37/38, pp. 74-77, 1989.
3. D. Knolle, D. Ratschko and M. Gläser, "A segmented Faraday cup for two-dimwnsional resentation of the current distribution of an ion beam," Rev. Sci. Instrum. vol. 67, no. 9, pp. 3082-3084, 1996.
4. G. D. Alton, "Sources of low-charge-state positive-ion beams," in Experimental Methods in the Physical Science, F. B. Dunning and R. Hulet, Eds. London, U.K.: Academic, 1995, ch. 3, pp. 82-83.
5. + beams extracted from a cold or hot reflex discharge ion source (CHORDIS)," unpublished.
6. R. G. Wilson and G. R. Brewer, Ion Beams With Application To Ion Implantation. New York: Wiley, 1973, p. 181.
7. J. R. Coupland, T. S. Green, D. P. Hammond, and A.C. Riviere, "A study of the ion beam intensity and divergence obtained from a single aoerture three electrode extraction system," Rev. Sci. Instrum., vol. 44, no. 9, pp. 1258-1270, 1973.
8. R. Keller, "Ion extraction," in The Physics and Technology of Ion Sources, I. G. Brown, Ed. New York: Wiley, 1991, pp. 25-26.