The effects of synchrotron x-rays on the local structure and the recrystallization of ion damaged Si

Semiconductor Science and Technology

Volumn 12, Issue 4, 1997, Pages 460-463

  Yu, Kin Man ^a   Wang, Lei ^a   Walukiewicz, W ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL STRUCTURE; CRYSTALLIZATION; EPITAXIAL GROWTH; ION BOMBARDMENT; SYNCHROTRONS; X RAY ANALYSIS;

SOLID PHASE EPITAXIAL REGROWTH;

AMORPHOUS SILICON;

EID: 0031122125     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/12/4/021     Document Type: Article

References (10)

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