Preparation and characterization of BaTiO3 thin films on MgO-buffered Si(100) substrates by RF sputtering

Journal of Materials Research

Volumn 12, Issue 4, 1997, Pages 1152-1159

  Kim, Sangsub ^a   Hishita, Shunichi ^b  

^a Sunchon National University   (South Korea)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAPACITORS; CRACKS; CRYSTAL ORIENTATION; ELECTRIC PROPERTIES; FILM GROWTH; FILM PREPARATION; MAGNESIA; MAGNETRON SPUTTERING; MORPHOLOGY; SEMICONDUCTING SILICON; SUBSTRATES;

BUFFER LAYERS; METAL INSULATOR METAL CAPACITORS; RADIO FREQUENCY MAGNETRON SPUTTERING;

THIN FILMS;

EID: 0031121970     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0159     Document Type: Article

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