Plasma polymerization of acetylene in a box-type radio frequency gas discharge reactor under plug flow condition

Journal of the Electrochemical Society

Volumn 144, Issue 4, 1997, Pages 1434-1439

  Uchida, T ^a   Vinogradov, G K ^a,b,c   Morita, S ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b ELECTROCHEMICAL SOCIETY

^c MC Electronics Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; FLOW OF FLUIDS; GAS DISCHARGE TUBES; PLASMAS; POLYACETYLENES; THIN FILMS;

GAS DISCHARGE REACTOR; PLASMA POLYMERIZATION; PLUG FLOW CONDITIONS;

POLYMERIZATION;

EID: 0031121691     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837607     Document Type: Article

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