Waveguide-integrated InP-InGaAs-InAlGaAs MSM photodetector with very-high vertical-coupling efficiency

IEEE Photonics Technology Letters

Volumn 9, Issue 4, 1997, Pages 496-498

  Kollakowski, St ^a   Bottcher E H ^a   Lemm, Ch ^a   Strittmatter, A ^a   Bimberg, D ^a   Krautle H ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b DEUTSCHE TELEKOM LABORATORIES   (Germany)

Author keywords

High speed devices; InAlGaAs; InGaAs; InP; MSM devices; Photodetectors; Semiconductor waveguides

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; LIGHT POLARIZATION; OPTICAL WAVEGUIDES; QUANTUM EFFICIENCY; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE;

GUIDE TO ABSORBER COUPLING EFFICIENCY; SEMICONDUCTOR WAVEGUIDES;

PHOTODETECTORS;

EID: 0031120639     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.559400     Document Type: Article

References (16)

1. K. Kato, S. Hata, K. Kawano, and A. Kozen, "Design of ultrawide-band, high-sensitivity p-i-n protodetectors," IEICE Trans. Electron., vol. E76, pp. 214-221, 1993.
2. R. J. Deri, "Monolithic integration of optical waveguide circuitry with III-V photodetectors for advanced lightwave receivers," J. Lightwave Technol., vol. 11, pp. 1296-1313, 1993.
3. J. B. D. Soole and H. Schumacher, "InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications," IEEE J. Quantum Electron., vol. 27, pp. 737-752, 1991.
4. E. H. Böttcher, D. Kuhl, F. Hieronymi, E. Dröge, T. Wolf, and D. Bimberg, "Ultrafast semiinsulating InP:Fe-InGaAs:Fe-InP:Fe MSM photodetectors: modeling and performance," IEEE J. Quantum Electron., vol. 28, pp. 2343-2357, 1992.
5. J. B. D. Soole, H. Schumacher, R. Esagui, H. P. LeBlanc, R. Bhat, and M. A. Koza, "High-speed metal-semiconductor-metal waveguide photodetector on InP," Appl. Phys. Lett., vol. 55, pp. 2173-2175, 1989.
6. R. J. Deri and O. Wada, "Impedance matching for enhanced waveguide/photodetector integration," Appl. Phys. Lett., vol. 55, pp. 2712-2714, 1989.
7. R. J. Deri, N. Yasuoka, M. Makiuchi, O. Wada, A. Kuramata, H. Hamaguchi, and R. J. Hawkins, "Integrated waveguide/photodetector using vertical impedance matching," Appl. Phys. Lett., vol. 56, pp. 1737-1739, 1990.
8. 1-x As/GaAs MSM detector exhibiting large extinction ratios at L and X band," IEEE Photon. Technol. Lett., vol. 5, pp. 514-517, 1993.
9. G. Unterbörsch, D. Trommer, A. Umbach, and G. G. Mekonnen, "High-bandwidth 1.55 μm waveguide integrated photodetector." in Proc. 8th Int. Conf. InP and Related Materials, Schwäbisch Gmünd, Germany, 1996, pp. 203-206.
10. 0.47-x As layers on InP in the wavelength range 280-1900 nm," Mater. Sci. Eng. B. vol. 21, pp. 174-176, 1993.
11. -InGaAsP waveguides for low-loss chip-to-fiber butt coupling: acomparison of different configurations," IEEE Photon. Technol. Lett., vol. 7, pp. 532-534, 1995.
12. St. Kollakowski, H. Kräutle, Ch. Lemm, E. H. Böttcher, and D. Bimberg, "Waveguide-integrated InP/InGaAs/InAlGaAs MSM photodetectors," in Proc. 8th Int. Conf. InP and Related Materials, Schwäbisch Gmünd, Germany, 1996, pp. 223-225.
13. H.-P. Nolting and G. Sztefka, "Eigenmode matching and propagation theory of square meander-type couplers," IEEE Photon. Technol. Lett., vol. 4, pp. 1386-1389, 1992.
14. G. Sztefka, Ph.D. dissertation, Technische Universität Berlin, Germany, 1995.
15. M.-C. Amann, "Analysis of a pin photodiode with integrated wave-guide," Electron. Lett., vol. 17, pp. 895-897, 1987.
16. E. H. Böttcher, F. Hieronymi, D. Kuhl, E. Dröge, and D. Bimberg, "Transient response of lateral photodetectors," Appl. Phys. Lett., vol. 62, pp. 2227-2229, 1993.