Propagation characteristics of surface acoustic waves in KNbO3/SrTiO3/Si layered structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 4 A, 1997, Pages 2192-2195

  Wu, Mu Shiang ^a   Shih, Wen Ching ^a  

^a TATUNG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Electromechanical coupling coefficient; KNbO3 thin films; Phase velocity; Si substrate; SrTiO3 buffer layer; Surface acoustic wave (SAW)

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENT; INTERDIGITAL TRANSDUCER (IDT); LAYERED STRUCTURE; PHASE VELOCITY; POTASSIUM NIOBATE; SURFACE ACOUSTIC WAVES (SAWS);

NUMERICAL METHODS; POTASSIUM COMPOUNDS; SILICON; STRONTIUM COMPOUNDS; SURFACE WAVES; THIN FILMS; TRANSDUCERS;

ACOUSTIC WAVE TRANSMISSION;

EID: 0031119020     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.2192     Document Type: Article

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