Interphase characterization of silicon-based Barrier layers on PET

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 38, Issue 1, 1997, Pages 998-999

  Schuhler N ^a   Da Silva Sobrinho, A S ^a   Klemberg Sapieha, J E ^a   Andrews, M ^b   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; INFRARED SPECTROSCOPY; INORGANIC COATINGS; INTERFACES (MATERIALS); MOLECULAR VIBRATIONS; SILICA; SILICON NITRIDE; SILICON WAFERS; ULTRATHIN FILMS;

ATTENUATED TOTAL REFLECTION INFRARED SPECTROSCOPY (ATRIR); ELASTIC RECOIL DETECTION (ERD); ENERGY DISPERSIVE X RAY FLUORESCENCE (EDX); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); SPIN COATING; STRETCHING VIBRATIONS;

POLYETHYLENE TEREPHTHALATES;

EID: 0031118354     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)

1. J.E. Klemberg-Sapieha, D. Poitras, L. Martinu, N.L.S. Yamasaki and C.W. Lantman. submitted to J. Vac. Sci. Technol.
2. J.E. Klemberg-Sapieha, O. M. Küttel, L. Martinu and M.R. Wertheimer. Thin Solid Films 193/194, 965 (1990).
3. R. Groleau, S.C. Gujrathi and J.-P. Martin. Nucl. Instr. and Meth. 218, 11 (1983).
4. F. Pászti, S. Szilágyi and E. Kótai. Nucl. Instr. and Meth. B54, 507 (1991).
5. J.R. Bird and J.S. Williams in Ion Beam for Material Analysis. ed. J.R. Bird and J.S. Williams, Academic Press 1989.
6. F.J. Boerio, S.K. Bahl and G.E. McGraw. J. Polym. Sci. Polym. Phys. Ed. 14, 1029 (1976).