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Volumn , Issue 59, 1997, Pages
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Review of diamond-like carbon technology
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACCELEROMETERS;
ACOUSTIC SURFACE WAVE DEVICES;
CHEMICAL VAPOR DEPOSITION;
COATINGS;
DRY ETCHING;
METALLIZING;
PRESSURE TRANSDUCERS;
SEMICONDUCTING FILMS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DOPING;
DIAMOND LIKE CARBON (DLC) TECHNOLOGY;
FABRY PEROT CAVITY PRESSURE TRANSDUCER;
SEMICONDUCTING DIAMONDS;
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EID: 0031108503
PISSN: 09633308
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (14)
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