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Volumn 32, Issue 5, 1997, Pages 1305-1312

An XPS and thermogravimetric study of oxidized AlN and AlN-Si3N4 layers deposited by liquid-phase chemical vapour deposition

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; BONDING; CHEMICAL VAPOR DEPOSITION; ETCHING; ION BOMBARDMENT; OXIDATION; OXIDATION RESISTANCE; PHOTOEMISSION; POLISHING; SURFACE CLEANING; THERMOGRAVIMETRIC ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0031103653     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018556606993     Document Type: Article
Times cited : (21)

References (38)
  • 9
    • 2242431572 scopus 로고
    • PhD thesis, Université de Montpellier, January
    • FRANK HENRY, PhD thesis, Université de Montpellier, January 1995.
    • (1995)
    • Henry, F.1
  • 19
    • 0020722809 scopus 로고
    • M. P. SEAH, Vacuum 34 (1984) 463.
    • (1984) Vacuum , vol.34 , pp. 463
    • Seah, M.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.