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Volumn 32, Issue 5, 1997, Pages 1163-1167

A Raman and photoconductivity analysis of boron-doped SiC: H films deposited using the electron cyclotron resonance method

(4) Yoon, S F a Ji, R a Ahn, J a Milne, W I b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRON CYCLOTRON RESONANCE; HYDROGEN; METHANE; MICROWAVES; PHOTOCONDUCTIVITY; RAMAN SCATTERING; SILANES; SILICON CARBIDE;

DARK CONDUCTIVITY; DIBORANE; HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS; MICROWAVE POWER;

AMORPHOUS FILMS;

EID: 0031103158 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1018571615654 Document Type: Article

Times cited : (1)

References (12)

1
- 0001241027
- M. N. P. CARRENO, I. PEREYRA, M. C. A. FANTINI, H. TAKAHASHI and R. LANDERS, J. Appl. Phys. 75 (1994) 538.
- (1994) J. Appl. Phys. , vol.75 , pp. 538
- Carreno, M.N.P.¹ Pereyra, I.² Fantini, M.C.A.³ Takahashi, H.⁴ Landers, R.⁵

2
- 0028447918
- S. Z. HAN, H. M. LEE and H. S. KWON, J. Non-Cryst. Solids 170 (1994) 199.
- (1994) J. Non-Cryst. Solids , vol.170 , pp. 199
- Han, S.Z.¹ Lee, H.M.² Kwon, H.S.³

3
- 0000115854
- F. DEMICHELIS, G. CROVINI, F. GIORGIS, C. F. PIRRI and E. TRESSO, Diamond Rel. Mater. 4 (1995) 473.
- (1995) Diamond Rel. Mater. , vol.4 , pp. 473
- Demichelis, F.¹ Crovini, G.² Giorgis, F.³ Pirri, C.F.⁴ Tresso, E.⁵

4
- 0012742186
- C. WANG, G. LUCOVSKY and R. J. NEMANICH, Proc. Mater. Res. Soc. Symp. 219 (1991) 751.
- (1991) Proc. Mater. Res. Soc. Symp. , vol.219 , pp. 751
- Wang, C.¹ Lucovsky, G.² Nemanich, R.J.³

5
- 36449001339
- F. DEMICHELIS, C. F. PIRRI and E. TRESSO, J. Appl. Phys. 72 (1992) 1327.
- (1992) J. Appl. Phys. , vol.72 , pp. 1327
- Demichelis, F.¹ Pirri, C.F.² Tresso, E.³

6
- 0001389391
- D. KRUANGAM, T. TOYAMA, Y. HATTORI, M. DEGUCHI, H. OKAMOTO and Y. HAMAKAWA, J. Non-Cryst. Solids 97/98 (1987) 293.
- (1987) J. Non-Cryst. Solids , vol.97-98 , pp. 293
- Kruangam, D.¹ Toyama, T.² Hattori, Y.³ Deguchi, M.⁴ Okamoto, H.⁵ Hamakawa, Y.⁶

7
- 0001746499
- Y. HATTORI, D. KRUANGAM, T. TOYAMA, H. OKAMOTO and Y. HAMAKAWA, ibid. 97/98 (1987) 1079.
- (1987) J. Non-Cryst. Solids , vol.97-98 , pp. 1079
- Hattori, Y.¹ Kruangam, D.² Toyama, T.³ Okamoto, H.⁴ Hamakawa, Y.⁵

8
- 4043071551
- H. MIMURA, T. FUTAGI, T. MATSUMOTO, M. KATSUNO, Y. OHTA and K. KITAMURA, Appl. Surf. Sci. 65/66 (1993) 473.
- (1993) Appl. Surf. Sci. , vol.65-66 , pp. 473
- Mimura, H.¹ Futagi, T.² Matsumoto, T.³ Katsuno, M.⁴ Ohta, Y.⁵ Kitamura, K.⁶

9
- 0039078304
- Springer-Verlag, Berlin, Germany
- T. MIYAJIMA, K. SASAKI and S. FURUKAWA, in "Proceedings of the 4th International Conference on Amorphous and Crystalline Silicon Carbide" (Springer-Verlag, Berlin, Germany, 1992) p. 281.
- (1992) Proceedings of the 4th International Conference on Amorphous and Crystalline Silicon Carbide , pp. 281
- Miyajima, T.¹ Sasaki, K.² Furukawa, S.³

10
- 2242427014
- edited by J. Taue Plenum, New York, Ch. 4
- J. TAUC, in "Amorphous and Liquid Semiconductors" edited by J. Taue (Plenum, New York, 1974) Ch. 4.
- (1974) Amorphous and Liquid Semiconductors
- Tauc, J.¹

11
- 0017922825
- R. A. STREET, Philos. Mag. B37 (1978) 35.
- (1978) Philos. Mag. , vol.B37 , pp. 35
- Street, R.A.¹

12
- 0000908079
- I. SOLOMON, M. P. SCHMIDT and H. TRAN-QUOC, Phys. Rev. B38 (1988) 9895.
- (1988) Phys. Rev. , vol.B38 , pp. 9895
- Solomon, I.¹ Schmidt, M.P.² Tran-Quoc, H.³

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