In-Line Moisture Monitoring in Semiconductor Process Gases by a Reactive-Metal-Coated Quartz Crystal Microbalance

Journal of the IEST

Volumn 40, Issue 2, 1997, Pages 43-48

  Wei, Jian ^a   Pillion, John ^a   Hoang, Chi ^a  

^a MILLIPORE CORPORATION   (United States)

Author keywords

APIMS; In line monitoring; Limit of detection; Moisture; Process gas; Quartz crystal microbalance; Sensors

Indexed keywords

COATING TECHNIQUES; ERROR ANALYSIS; MASS SPECTROMETRY; METALS; MONITORING; PIEZOELECTRIC DEVICES; SENSORS; THIN FILMS;

ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY; GAS DISTRIBUTION SYSTEM; IN LINE MOISTURE MONITORING; QUARTZ CRYSTAL MICROBALANCE; SEMICONDUCTOR PROCESS GASES;

MOISTURE DETERMINATION;

EID: 0031101972     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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