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Volumn 244, Issue 1, 1997, Pages 51-58
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TEM and IBA study of the thermal oxidation of V following high dose He implantation
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Author keywords
[No Author keywords available]
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Indexed keywords
HELIUM;
ION IMPLANTATION;
OXYGEN;
TRANSMISSION ELECTRON MICROSCOPY;
VOLUME FRACTION;
BUBBLE ARRAYS;
BUBBLE STRUCTURE;
ION BEAM ANALYSIS;
OXIDE LAYER;
THERMAL OXIDATION;
VANADIUM;
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EID: 0031101955
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3115(96)00726-X Document Type: Article |
Times cited : (16)
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References (29)
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