Optical modulation spectroscopy of hydrogenated microcrystalline silicon

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 118-121

  Cerqueira, M F ^a   Jansen, J ^b   Adriaenssens, G J ^b   Ferreira, J A ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Hydrogenated silicon; Optical modulation spectroscopy

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELECTRIC CONDUCTIVITY MEASUREMENT; ENERGY GAP; LIGHT MODULATION; OPTICAL PROPERTIES; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

OPTICAL MODULATION SPECTROSCOPY (OMS); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); RADIOFREQUENCY SPUTTERING;

SEMICONDUCTING SILICON;

EID: 0031101808     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09353-4     Document Type: Article

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