Structure of poly-Si films obtained by laser annealing

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 57-60

  Carluccio, R ^a   Cina, S ^a   Fortunato, G ^a   Friligkos, S ^b   Stoemenos, J ^b  

^a CNR   (Italy)

^b ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Grain size; Laser annealing; Poly silicon films; Transmission electron microscopy

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL GROWTH; GRAIN SIZE AND SHAPE; LASER APPLICATIONS; LASER BEAM EFFECTS; POLYCRYSTALLINE MATERIALS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

LASER ANNEALING;

SILICON;

EID: 0031101807     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09347-9     Document Type: Article

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