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Volumn 6, Issue 2, 1997, Pages 21-22
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Lithography on reflective substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
LIGHT PROPAGATION;
LIGHT REFLECTION;
REFRACTIVE INDEX;
SILICON NITRIDE;
SUBSTRATES;
REFLECTIVE SUBSTRATES;
PHOTORESISTS;
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EID: 0031101211
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (8)
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References (0)
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