Early stage growth of hydrogenated amorphous carbon

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 72-75

  Azuma, Kazufumi ^a   Shirai, Hajime ^b   Kouchi, Tetsu ^c  

^a HITACHI LTD   (Japan)

^b SAITAMA UNIVERSITY   (Japan)

^c Sanyei Bldg   (Japan)

Author keywords

Atomic force microscopy; Growth; Hydrogenated amorphous carbon

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELLIPSOMETRY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; HYDROGENATION; NUCLEATION; PLASMA APPLICATIONS; SEMICONDUCTING SILICON;

CAPACITIVELY COUPLED PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; HYDROGENATED AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 0031100931     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09342-X     Document Type: Article

References (9)

1. United States Patent No. 5,175,658, International Business Machines Corporation.
2. B. Drévillon, J. Perrin, R. Marbot, A. Violet and J.L. Dalby, Rev. Sci. Instrum., 53 (1982) 969.
3. A. Canillas, E. Bertran, J.L. Andújar and J.L. Morenza, Vacuum, 39 (1989) 785.
4. A.R. Forouhi and I. Bloomer, Phys. Rev. B, 34 (1986) 7018.
5. A. Canillas, E. Bertran, J.L. Andújar and B. Drévillon, J. Appl. Phys., 68 (1990) 2752.
6. E.D. Palik (ed.), Handbook of Optical Constants of Solids, Academic Press, p. 104.
7. B. Hong, M. Wakagi, W. Drawl, R. Messier and R.W. Collins, Phys. Rev. Lett., 75 (1995) 1122.
8. A. Canillas, E. Pascual and B. Drévillon, Thin Solid Films, 234 (1993) 318.
9. A.M. Antoine and B. Drévillon, J. Appl. Phys., 63 (1987) 360.