Development of a new displacement-measuring ultrasonic sensor based on astigmatic focus error detection-measuring principle and its demonstration

Precision Engineering

Volumn 20, Issue 2, 1997, Pages 93-98

  Mitsui, Kimiyuki ^a   Koike, Makoto ^b   Tsukamoto, Hidehiko ^c   Yajima, Minoru ^c  

^a KEIO UNIVERSITY   (Japan)

^b FUJIFILM CORPORATION   (Japan)

^c MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Astigmatic focus error detection; Astigmatism; Displacement measurement; In process measurement; Measuring instrument; Noncontact measurement; Ultrasonic wave; Ultrasound

Indexed keywords

ERROR DETECTION; ULTRASONIC WAVES;

ASTIGMATIC FOCUS ERROR DETECTION;

ULTRASONIC TRANSDUCERS;

EID: 0031100849     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)81196-8     Document Type: Article

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