Study on Si3N4 film microlens by laser chemical vapor deposition

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 17, Issue 2, 1997, Pages 84-87

  Song, Guorui ^a   Lan, Zhugang ^a   Yao, Huizhen ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LASER APPLICATIONS; SILICON COMPOUNDS; THIN FILMS;

CHEMICAL MIXTURE RATIO; MICROLENS;

LENSES;

EID: 0031100662     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)