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Volumn 81, Issue 5, 1997, Pages 2119-2123
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Effect of secondary electron emission on sheath potential in an electron cyclotron resonance plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
CALCULATIONS;
ELECTRIC FIELDS;
ELECTRON CYCLOTRON RESONANCE;
ELECTRON EMISSION;
ELECTRONS;
HYDROGEN;
IONS;
NITROGEN;
PRESSURE EFFECTS;
PROBES;
TEMPERATURE MEASUREMENT;
ELECTRON TEMPERATURE;
ENERGY TRANSMISSION FACTORS;
ION TEMPERATURE;
LANGMUIR PROBE;
RETARDING FIELD ANALYZER;
SHEATH POTENTIAL;
PLASMA SHEATHS;
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EID: 0031100398
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.364264 Document Type: Article |
Times cited : (2)
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References (15)
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