Germanium-carbon multilayer films prepared by magnetron sputtering - Structure and thermally induced formation of Ge-nanocrystals

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 69-71

  John, Thomas Maik ^a   Veit, Peter ^a   Anton, Rainer ^a   Drüsedau, Tilo P ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Germanium nanocrystals; Magnetron sputtering

Indexed keywords

ANNEALING; CARBON; CRYSTAL GROWTH; CRYSTALLIZATION; GERMANIUM; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

X RAY REFLECTION SPECTROSCOPY;

MULTILAYERS;

EID: 0031100333     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09379-0     Document Type: Article

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