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Volumn 45, Issue 1-3, 1997, Pages 30-35
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Ion assisted laser processing of cubic boron nitride films
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Author keywords
Cubic boron nitride films; Laser ablation; Microstructures
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CRYSTAL MICROSTRUCTURE;
DEPOSITION;
EVAPORATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
ION BOMBARDMENT;
LASER ABLATION;
NITROGEN;
POLYCRYSTALLINE MATERIALS;
SYNTHESIS (CHEMICAL);
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ION ASSISTED LASER PROCESSING;
CUBIC BORON NITRIDE;
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EID: 0031100278
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(96)01970-8 Document Type: Article |
Times cited : (8)
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References (15)
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