Nondestructive evaluation of SAW devices using a high-resolution optical detection technique

AEU-Archiv fur Elektronik und Ubertragungstechnik

Volumn 51, Issue 2, 1997, Pages 91-96

  Holm, Andreas ^a   Ruile, Werner ^a,b,d   Weigel, Robert ^a,c,e,f,g,h  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b SIEMENS AG   (Germany)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^d UNIVERSITY OF MUNICH   (Germany)

^e VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^f IEEE

^g Siemens AG ^*

^h Electromagnetics Academy

Author keywords

Laser probing; SAW phase velocity measurement; SAW wave field measurement

Indexed keywords

ACOUSTIC FIELD MEASUREMENT; ACOUSTIC RESONATORS; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVE DIFFRACTION; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE VELOCITY MEASUREMENT; LASER APPLICATIONS; LASER MODE LOCKING; NONDESTRUCTIVE EXAMINATION; PHOTODIODES;

HIGH RESOLUTION OPTICAL DETECTION TECHNIQUE; LASER PROBING; MICROACOUSTIC WAVE PROPAGATION; SURFACE ACOUSTIC WAVE DEVICE PHASE VELOCITY MEASUREMENT; SURFACE ACOUSTIC WAVE DEVICE WAVE FIELD MEASUREMENT;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0031098817     PISSN: 00011096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

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