Influence of the number of bilayers on the optical performances of X-UV multilayer interferential mirrors

Journal of X-Ray Science and Technology

Volumn 7, Issue 1, 1997, Pages 24-36

  Guichet, C ^a   Rivoira, R ^a   Rasigni, G ^a   Andre, J M ^b   Barchewitz, R ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE INTERFERENCE; ELECTROMAGNETIC WAVE REFLECTION; ETCHING; INTERFEROMETRY; OPTICAL MULTILAYERS; REFLECTOMETERS; SPUTTERING; X RAY APPARATUS; X RAY DIFFRACTION ANALYSIS;

MULTILAYER INTERFERENTIAL MIRRORS (MIM);

MIRRORS;

EID: 0031098260     PISSN: 08953996     EISSN: None     Source Type: Journal    
DOI: 10.1006/jxra.1997.0246     Document Type: Article

References (23)

1. J. H. Underwood and D. T. Attwood, Phys. Today 37, 44 (1984).
2. T. W. Barbee Jr., Proc. Soc. Photo-Opt. Instrum. Eng. 1159, 638 (1989).
3. E. Spiller and A. Segmüller, Ann. NY Acad. Sci. 342, 188 (1980).
4. T. W. Barbee Jr. and J. H. Underwood, Opt. Comm. 48, 161 (1983).
5. Y. Lepêtre, R. Rivoira, R. Philip, and G. Rasigni, Opt. Comm. 51, 127 (1984).
6. D. J. Nagel, T.W. Barbee Jr., and J. V. Gilfrich, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 110 (1981).
7. R. Philip, R. Rivoira, Y. Lepêtre, and G. Rasigni, Appl. Opt. 27, 1918 (1988).
8. C. Guichet, R. Rivoira, G. Rasigni, and A. Charaï, Microsc. Microanal. Microstruct. 5, 189 (1994).
9. C. Guichet, R. Rivoira, G. Rasigni, R. Barchewitz, and J. M. André, Proc. Soc. Photo-Opt. Instrum. Eng. 2253, 287 (1994).
10. E. Ziegler, Proc. Soc. Photo-Opt. Instrum. Eng. 2253, 287 (1994).
11. K. D. Joensen, P. Høghøj, F. Christensen, P. Gorenstein, J. Susini, E. Ziegler, A. Freund, and J. Wood, Proc. Soc. Photo-Opt. Instrum. Eng. 2011, 360 (1993).
12. A. Erko, B. Vidai, A. Yakshin, and F. Schäfers, Proc. Soc. Photo-Opt. Instrum. Eng. 2516, 206 (1995).
13. A. Yakshin, thesis, University of Aix-Marseille III, 1995.
14. J. M. André, A. Sammar, C. Khan-Malek, P. Troussel, S. Bac, R. Barchewitz, B. Pardo, H. Berrouane, T. Moreno, F. R. Ladan, R. Rivoira, and D. Schirmann, Rev. Sci. Instrum. 63, 1399 (1992).
15. A. Sammar, J. M. André, M. Ouahabi, B. Pardo, and R. Barchewitz, C. R. Acad. Paris, Sér. II 316, 1055 (1993).
16. A. V. Vinogradov and B. Y. Zeldovich, Appl. Opt. 16, 89 (1977).
17. P. Lee, Opt. Comm. 37, 159 (1981).
18. J. M. André, A. Sammar, S. Bac, M. Ouahabi, M. Idir, G. Soullié, and R. Barchewitz, J. Phys. III France 4, 1659 (1994).
19. A. Sammar, J. M. André, and B. Pardo, Opt. Comm. 86, 245 (1991).
20. M. Arbaoui, R. Barchewitz, J. M. André, Y. Lepêtre, and R. Rivoira, Opt. Eng. 25, 1207 (1986).
21. A. E. Rosenbluth and P. Lee, Appl. Phys. Lett. 40, 466 (1982).
22. E. Spiller and A. E. Rosenbluth, Opt. Eng. 25, 954 (1986).
23. Y. Lepêtre and A. Charaï, Thin Solid Films 105, 71 (1983).