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Volumn 63, Issue 607, 1997, Pages 636-642
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Dislocation density analyses of bulk semiconductor single crystals during Czochralski growth
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
COMPUTER SOFTWARE;
CREEP;
CRYSTAL GROWTH;
DISLOCATIONS (CRYSTALS);
FINITE ELEMENT METHOD;
STRAIN RATE;
THERMAL STRESS;
COMPUTATIONAL MECHANICS;
CZOCHRALSKI GROWTH;
DISLOCATION DENSITY ANALYSES;
SEMICONDUCTOR SINGLE CRYSTALS;
SINGLE CRYSTALS;
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EID: 0031098018
PISSN: 03875008
EISSN: None
Source Type: Journal
DOI: 10.1299/kikaia.63.636 Document Type: Article |
Times cited : (1)
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References (27)
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