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Volumn 6, Issue 1, 1997, Pages 18-23
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Principia Moore
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
EPITAXIAL GROWTH;
INTEGRATED CIRCUITS;
ION IMPLANTATION;
MICROCOMPUTERS;
PHOTOLITHOGRAPHY;
POLISHING;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR MATERIALS;
CHEMICAL MECHANICAL POLISHING;
GORDON MOORE;
LOCAL OXIDATION OF SILICON STRUCTURES;
PLANAR PROCESS;
SEMICONDUCTOR TECHNOLOGY;
SEMICONDUCTOR DEVICES;
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EID: 0031097699
PISSN: 10648208
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (5)
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References (0)
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