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Volumn 8, Issue 3, 1997, Pages 338-339
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A piezomotor-based versatile positioner for SPM
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Author keywords
[No Author keywords available]
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Indexed keywords
PIEZOELECTRIC DEVICES;
PROBES;
STEPPING MOTORS;
THERMAL EXPANSION;
POSITIONING MODULE;
SCANNING PROBE MICROSCOPES;
STEPPING PIEZOMOTOR;
MICROSCOPES;
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EID: 0031095854
PISSN: 09570233
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-0233/8/3/018 Document Type: Article |
Times cited : (1)
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References (5)
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