Time resolved microwave conductivity measurements for the characterization of transport properties in thin film micro-crystalline silicon

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 94-97

  Brenot, R ^a   Vanderhaghen, R ^a   Drevillon, B ^a   French, I ^b   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Microwave reflectivity; Time resolved microwave conductivity; Transport properties

Indexed keywords

ANNEALING; CHARGE CARRIERS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; INTERFACES (MATERIALS); LASER PULSES; MICROWAVE MEASUREMENT; SEMICONDUCTING SILICON; TRANSPORT PROPERTIES;

MICROWAVE REFLECTIVITY; TIME RESOLVED MICROWAVE CONDUCTIVITY (TRMC);

SEMICONDUCTING FILMS;

EID: 0031094711     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09377-7     Document Type: Article

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