Damage induced in materials by ion implantation

Materials Science and Engineering B

Volumn 45, Issue 1-3, 1997, Pages 25-29

  Mathur, M S ^a   McKee, J S C ^a   Liu, M ^a   He, D ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

Atomic force microscopy; Ion implantation; Surface damage

Indexed keywords

ATOMIC FORCE MICROSCOPY; BAND STRUCTURE; ION IMPLANTATION; SURFACE PHENOMENA;

KAPTON;

PALLADIUM;

EID: 0031094188     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01901-0     Document Type: Article

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5. J.S.C. McKee, M.S. Mathur and G.R. Smith, Scanning Microsc., 7 (4) (1993) 117.
6. J.F. Ziegler, J.P. Biersak and U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985.